Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6949143 | Dual substrate loadlock process equipment | Wendell T. Blonigan, Akihiro Hosokawa | 2005-09-27 |
| 6856858 | Shared sensors for detecting substrate position/presence | — | 2005-02-15 |