Issued Patents 2005
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6915592 | Method and apparatus for generating gas to a processing chamber | — | 2005-07-12 |
| 6916147 | Substrate storage cassette with substrate alignment feature | Dongchoon Suh, Wendell T. Blonigan | 2005-07-12 |
| 6902947 | Integrated method for release and passivation of MEMS structures | Jeffrey D. Chinn, Michael Rattner, James A. Cooper, Toi Yue Becky Leung, Claes Bjorkman | 2005-06-07 |
| 6900133 | Method of etching variable depth features in a crystalline substrate | Jeffrey D. Chinn, Michael Rattner, James A. Cooper | 2005-05-31 |