Issued Patents 2005
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6936183 | Etch process for etching microstructures | Sofiane Soukane | 2005-08-30 |
| 6902947 | Integrated method for release and passivation of MEMS structures | Rolf Guenther, Michael Rattner, James A. Cooper, Toi Yue Becky Leung, Claes Bjorkman | 2005-06-07 |
| 6900133 | Method of etching variable depth features in a crystalline substrate | Michael Rattner, James A. Cooper, Rolf Guenther | 2005-05-31 |
| 6887732 | Microstructure devices, methods of forming a microstructure device and a method of forming a MEMS device | Vidyut Gopal | 2005-05-03 |
| 6849554 | Method of etching a deep trench having a tapered profile in silicon | Michael Rattner | 2005-02-01 |
| 6846746 | Method of smoothing a trench sidewall after a deep trench silicon etch process | Michael Rattner | 2005-01-25 |