Issued Patents 2005
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6902947 | Integrated method for release and passivation of MEMS structures | Jeffrey D. Chinn, Rolf Guenther, Michael Rattner, James A. Cooper, Claes Bjorkman | 2005-06-07 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6902947 | Integrated method for release and passivation of MEMS structures | Jeffrey D. Chinn, Rolf Guenther, Michael Rattner, James A. Cooper, Claes Bjorkman | 2005-06-07 |