Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6902947 | Integrated method for release and passivation of MEMS structures | Jeffrey D. Chinn, Rolf Guenther, Michael Rattner, Toi Yue Becky Leung, Claes Bjorkman | 2005-06-07 |
| 6900133 | Method of etching variable depth features in a crystalline substrate | Jeffrey D. Chinn, Michael Rattner, Rolf Guenther | 2005-05-31 |