Issued Patents 2005
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6976782 | Methods and apparatus for in situ substrate temperature monitoring | — | 2005-12-20 |
| 6952255 | System and method for integrated multi-use optical alignment | Andrew Perry, Neil Benjamin | 2005-10-04 |
| 6896765 | Method and apparatus for the compensation of edge ring wear in a plasma processing chamber | — | 2005-05-24 |
| 6858265 | Technique for improving chucking reproducibility | Fred C. Redeker, Shijian Li | 2005-02-22 |
| 6847014 | Method and apparatus for controlling the spatial temperature distribution across the surface of a workpiece support | Neil Benjamin | 2005-01-25 |