Issued Patents 2005
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6974550 | Apparatus and method for controlling the voltage applied to an electrostatic shield used in a plasma generator | Andras Kuthi | 2005-12-13 |
| 6972579 | Wafer integrated plasma probe assembly array | — | 2005-12-06 |
| 6952255 | System and method for integrated multi-use optical alignment | Andrew Perry, Robert Steger | 2005-10-04 |
| 6920312 | RF generating system with fast loop control | — | 2005-07-19 |
| 6901808 | Capacitive manometer having reduced process drift | Leonard J. Sharpless, Jeffrey W. Fish | 2005-06-07 |
| 6847014 | Method and apparatus for controlling the spatial temperature distribution across the surface of a workpiece support | Robert Steger | 2005-01-25 |