Issued Patents 2005
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6974550 | Apparatus and method for controlling the voltage applied to an electrostatic shield used in a plasma generator | Neil Benjamin | 2005-12-13 |
| 6876155 | Plasma processor apparatus and method, and antenna | Arthur M. Howald | 2005-04-05 |
| 6841943 | Plasma processor with electrode simultaneously responsive to plural frequencies | Vahid Vahedi, Peter Loewenhardt, Albert R. Ellingboe, Andreas Fischer | 2005-01-11 |
| 6842147 | Method and apparatus for producing uniform processing rates | Arthur M. Howald, Mark Wilcoxson, Andrew D. Bailey, III | 2005-01-11 |
| 6838832 | Apparatus and methods for improving the stability of RF power delivery to a plasma load | Arthur M. Howald, Andrew D. Bailey, III | 2005-01-04 |