Issued Patents 2005
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6965506 | System and method for dechucking a workpiece from an electrostatic chuck | — | 2005-11-15 |
| 6876155 | Plasma processor apparatus and method, and antenna | Andras Kuthi | 2005-04-05 |
| 6842147 | Method and apparatus for producing uniform processing rates | Andras Kuthi, Mark Wilcoxson, Andrew D. Bailey, III | 2005-01-11 |
| 6838832 | Apparatus and methods for improving the stability of RF power delivery to a plasma load | Andras Kuthi, Andrew D. Bailey, III | 2005-01-04 |