Issued Patents 2005
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6939796 | System, method and apparatus for improved global dual-damascene planarization | Shrikant Lohokare, David Hemker, Joel M. Cook | 2005-09-06 |
| 6873112 | Method for producing a semiconductor device | Mark Wilcoxson | 2005-03-29 |
| 6842147 | Method and apparatus for producing uniform processing rates | Arthur M. Howald, Andras Kuthi, Mark Wilcoxson | 2005-01-11 |
| 6838832 | Apparatus and methods for improving the stability of RF power delivery to a plasma load | Arthur M. Howald, Andras Kuthi | 2005-01-04 |