Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6921724 | Variable temperature processes for tunable electrostatic chuck | Tom A. Kamp, Richard A. Gottscho, Steve Lee, Chris Lee, Yoko Yamaguchi +1 more | 2005-07-26 |
| 6841943 | Plasma processor with electrode simultaneously responsive to plural frequencies | Peter Loewenhardt, Albert R. Ellingboe, Andras Kuthi, Andreas Fischer | 2005-01-11 |