Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6923920 | Method and compositions for hardening photoresist in etching processes | Yousun Taylor, Wendy Nguyen | 2005-08-02 |
| 6921724 | Variable temperature processes for tunable electrostatic chuck | Tom A. Kamp, Richard A. Gottscho, Steve Lee, Yoko Yamaguchi, Vahid Vahedi +1 more | 2005-07-26 |