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Yoko Yamaguchi

Lam Research: 1 patents #64 of 181Top 40%
📍 Union City, CA: #31 of 104 inventorsTop 30%
🗺 California: #7,981 of 26,868 inventorsTop 30%
Overall (2005): #69,733 of 245,428Top 30%
1
Patents 2005

Issued Patents 2005

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
6921724 Variable temperature processes for tunable electrostatic chuck Tom A. Kamp, Richard A. Gottscho, Steve Lee, Chris Lee, Vahid Vahedi +1 more 2005-07-26