SL

Steve Lee

Lam Research: 1 patents #64 of 181Top 40%
📍 Lexington, MA: #66 of 208 inventorsTop 35%
🗺 Massachusetts: #1,495 of 6,037 inventorsTop 25%
Overall (2005): #97,811 of 245,428Top 40%
1
Patents 2005

Issued Patents 2005

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
6921724 Variable temperature processes for tunable electrostatic chuck Tom A. Kamp, Richard A. Gottscho, Chris Lee, Yoko Yamaguchi, Vahid Vahedi +1 more 2005-07-26