Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6939811 | Apparatus and method for controlling etch depth | Alan J. Miller, Vijayakumar C. Venugopal | 2005-09-06 |
| 6921724 | Variable temperature processes for tunable electrostatic chuck | Richard A. Gottscho, Steve Lee, Chris Lee, Yoko Yamaguchi, Vahid Vahedi +1 more | 2005-07-26 |