Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6979578 | Process endpoint detection method using broadband reflectometry | — | 2005-12-27 |
| 6939811 | Apparatus and method for controlling etch depth | Tom A. Kamp, Alan J. Miller | 2005-09-06 |