Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6887612 | Fuel cell | Stefan Bitterlich, Hartwig Voss, Werner Weppner, Ingolf Voigt | 2005-05-03 |
| 6854484 | Valve for a slurry outlet opening of a chemical mechanical polishing device and chemical mechanical polishing device having a valve | Stefan Geyer | 2005-02-15 |
| 6841943 | Plasma processor with electrode simultaneously responsive to plural frequencies | Vahid Vahedi, Peter Loewenhardt, Albert R. Ellingboe, Andras Kuthi | 2005-01-11 |