Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6949204 | Deformation reduction at the main chamber | Eric H. Lenz, Fangli Hao | 2005-09-27 |
| 6841943 | Plasma processor with electrode simultaneously responsive to plural frequencies | Vahid Vahedi, Peter Loewenhardt, Andras Kuthi, Andreas Fischer | 2005-01-11 |