Issued Patents 2005
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6979579 | Methods and apparatus for inspecting contact openings in a plasma processing system | Jisoo Kim, Sangheon Lee, Sean S. Kang, Binet Worsham, Bi-Ming Yen +1 more | 2005-12-27 |
| 6949460 | Line edge roughness reduction for trench etch | Eric Wagganer, Helen Zhu, Daniel Le | 2005-09-27 |
| 6949469 | Methods and apparatus for the optimization of photo resist etching in a plasma processing system | Yu-Huei Cheng, Helen Zhu, Vinay V. Phoray, Hanzhong Xiao | 2005-09-27 |
| 6841943 | Plasma processor with electrode simultaneously responsive to plural frequencies | Vahid Vahedi, Albert R. Ellingboe, Andras Kuthi, Andreas Fischer | 2005-01-11 |