DL

Daniel Le

Lam Research: 1 patents #64 of 181Top 40%
🗺 California: #7,981 of 26,868 inventorsTop 30%
Overall (2005): #216,170 of 245,428Top 90%
1
Patents 2005

Issued Patents 2005

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
6949460 Line edge roughness reduction for trench etch Eric Wagganer, Helen Zhu, Peter Loewenhardt 2005-09-27