Issued Patents 2005
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6949460 | Line edge roughness reduction for trench etch | Eric Wagganer, Helen Zhu, Peter Loewenhardt | 2005-09-27 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6949460 | Line edge roughness reduction for trench etch | Eric Wagganer, Helen Zhu, Peter Loewenhardt | 2005-09-27 |