Issued Patents 2005
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6949469 | Methods and apparatus for the optimization of photo resist etching in a plasma processing system | Yu-Huei Cheng, Helen Zhu, Vinay V. Phoray, Peter Loewenhardt | 2005-09-27 |