Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6979579 | Methods and apparatus for inspecting contact openings in a plasma processing system | Jisoo Kim, Sangheon Lee, Sean S. Kang, Binet Worsham, Reza Sadjadi +1 more | 2005-12-27 |
| 6930048 | Etching a metal hard mask for an integrated circuit structure | Siyi Li, S.M. Sadjadi, Sean S. Kang, Tri C. Le, Scott Briggs | 2005-08-16 |