Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6969685 | Etching a dielectric layer in an integrated circuit structure having a metal hard mask layer | S. M. Reza Sadjadi, Sean S. Kang | 2005-11-29 |
| 6930048 | Etching a metal hard mask for an integrated circuit structure | S.M. Sadjadi, Sean S. Kang, Tri C. Le, Bi-Ming Yen, Scott Briggs | 2005-08-16 |
| 6909195 | Trench etch process for low-k dielectrics | S. M. Reza Sadjadi, David R. Pirkle, Steve Lassig, Sean S. Kang, Vinay Pohray +1 more | 2005-06-21 |