Issued Patents 2005
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6909195 | Trench etch process for low-k dielectrics | Siyi Li, S. M. Reza Sadjadi, David R. Pirkle, Sean S. Kang, Vinay Pohray +1 more | 2005-06-21 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6909195 | Trench etch process for low-k dielectrics | Siyi Li, S. M. Reza Sadjadi, David R. Pirkle, Sean S. Kang, Vinay Pohray +1 more | 2005-06-21 |