Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6909195 | Trench etch process for low-k dielectrics | Siyi Li, S. M. Reza Sadjadi, David R. Pirkle, Steve Lassig, Sean S. Kang +1 more | 2005-06-21 |
| 6875699 | Method for patterning multilevel interconnects | Stephan Lassig, S. M. Reza Sadjadi, Si Yi Li, Thomas W. Mountsier, Chiu Chi | 2005-04-05 |