Issued Patents 2005
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6972524 | Plasma processing system control | Alexei Marakhtanov, Eric A. Hudson | 2005-12-06 |
| 6969685 | Etching a dielectric layer in an integrated circuit structure having a metal hard mask layer | Siyi Li, Sean S. Kang | 2005-11-29 |
| 6962879 | Method of plasma etching silicon nitride | Helen Zhu, David R. Pirkle, Andrew S. Li | 2005-11-08 |
| 6919278 | Method for etching silicon carbide | Sean S. Kang, Si Yi Li | 2005-07-19 |
| 6909195 | Trench etch process for low-k dielectrics | Siyi Li, David R. Pirkle, Steve Lassig, Sean S. Kang, Vinay Pohray +1 more | 2005-06-21 |
| 6875699 | Method for patterning multilevel interconnects | Stephan Lassig, Vinay Pohray, Si Yi Li, Thomas W. Mountsier, Chiu Chi | 2005-04-05 |