Issued Patents 2005
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6972524 | Plasma processing system control | Alexei Marakhtanov, S. M. Reza Sadjadi | 2005-12-06 |
| 6969237 | Turbine airfoil cooling flow particle separator | — | 2005-11-29 |
| 6916746 | Method for plasma etching using periodic modulation of gas chemistry | James V. Tietz | 2005-07-12 |
| 6908846 | Method and apparatus for detecting endpoint during plasma etching of thin films | Brian McMillin, Jeffrey Marks | 2005-06-21 |