Issued Patents 2005
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6916746 | Method for plasma etching using periodic modulation of gas chemistry | Eric A. Hudson | 2005-07-12 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6916746 | Method for plasma etching using periodic modulation of gas chemistry | Eric A. Hudson | 2005-07-12 |