Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6962879 | Method of plasma etching silicon nitride | Helen Zhu, S. M. Reza Sadjadi, Andrew S. Li | 2005-11-08 |
| 6909195 | Trench etch process for low-k dielectrics | Siyi Li, S. M. Reza Sadjadi, Steve Lassig, Sean S. Kang, Vinay Pohray +1 more | 2005-06-21 |