Issued Patents 2005
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6979579 | Methods and apparatus for inspecting contact openings in a plasma processing system | Sangheon Lee, Sean S. Kang, Binet Worsham, Bi-Ming Yen, Reza Sadjadi +1 more | 2005-12-27 |