Issued Patents 2005
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6949204 | Deformation reduction at the main chamber | Eric H. Lenz, Albert R. Ellingboe | 2005-09-27 |
| 6922867 | Two position robot design for FOUP purge | — | 2005-08-02 |
| 6889627 | Symmetrical semiconductor reactor | — | 2005-05-10 |
| 6863784 | Linear drive system for use in a plasma processing system | Keith Dawson, Eric H. Lenz | 2005-03-08 |