Issued Patents 2005
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6949204 | Deformation reduction at the main chamber | Albert R. Ellingboe, Fangli Hao | 2005-09-27 |
| 6872281 | Chamber configuration for confining a plasma | Jian J. Chen, Mukund Srinivasan | 2005-03-29 |
| 6863784 | Linear drive system for use in a plasma processing system | Fangli Hao, Keith Dawson | 2005-03-08 |
| 6838012 | Methods for etching dielectric materials | — | 2005-01-04 |