Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6911059 | Abrasive pad and process for the wet-chemical grinding of a substrate surface | — | 2005-06-28 |
| 6854484 | Valve for a slurry outlet opening of a chemical mechanical polishing device and chemical mechanical polishing device having a valve | Andreas Fischer | 2005-02-15 |