Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6913518 | Profile control platen | Hung Chih Chen, Steven M. Zuniga, Charles C. Garretson, Sen-Hou Ko, Mohsen Salek | 2005-07-05 |
| 6863593 | Chemical mechanical polishing a substrate having a filler layer and a stop layer | Raymond R. Jin, Shijian Li, Fred C. Redeker | 2005-03-08 |
| 6855043 | Carrier head with a modified flexible membrane | Jianshe Tang, Brian J. Brown, Charles C. Garretson, Benjamin A. Bonner, Fred C. Redeker | 2005-02-15 |