Issued Patents 2005
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6855043 | Carrier head with a modified flexible membrane | Jianshe Tang, Brian J. Brown, Charles C. Garretson, Thomas H. Osterheld, Fred C. Redeker | 2005-02-15 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6855043 | Carrier head with a modified flexible membrane | Jianshe Tang, Brian J. Brown, Charles C. Garretson, Thomas H. Osterheld, Fred C. Redeker | 2005-02-15 |