Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6913518 | Profile control platen | Hung Chih Chen, Steven M. Zuniga, Thomas H. Osterheld, Sen-Hou Ko, Mohsen Salek | 2005-07-05 |
| 6855031 | Slurry flow rate monitoring in chemical-mechanical polisher using pressure transducer | Boris Fuksshimov, Jeff P Rudd, Brian J. Brown | 2005-02-15 |
| 6855043 | Carrier head with a modified flexible membrane | Jianshe Tang, Brian J. Brown, Benjamin A. Bonner, Thomas H. Osterheld, Fred C. Redeker | 2005-02-15 |