Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6913518 | Profile control platen | Hung Chih Chen, Steven M. Zuniga, Charles C. Garretson, Thomas H. Osterheld, Mohsen Salek | 2005-07-05 |
| 6896584 | Method of controlling carrier head with multiple chambers | Ilya Perlov, Eugene Gantvarg | 2005-05-24 |
| 6857946 | Carrier head with a flexure | Steven M. Zuniga, Manoocher Birang, Hung Chih Chen | 2005-02-22 |