Issued Patents 2005
Showing 1–15 of 15 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6977036 | Method and apparatus for substrate polishing | Ralph Wadensweiler, Alain Duboust, Liang-Yuh Chen, Ratson Morad, Paul D. Butterfield | 2005-12-20 |
| 6975107 | Eddy current sensing of metal removal for chemical mechanical polishing | Hiroji Hanawa, Nils Johansson, Boguslaw A. Swedek | 2005-12-13 |
| 6966816 | Integrated endpoint detection system with optical and eddy current monitoring | Boguslaw A. Swedek, Nils Johansson | 2005-11-22 |
| 6939198 | Polishing system with in-line and in-situ metrology | Boguslaw A. Swedek, Bret W. Adams, Sanjay Rajaram, David A. Chan | 2005-09-06 |
| 6930478 | Method for monitoring a metal layer during chemical mechanical polishing using a phase difference signal | Hiroji Hanawa, Nils Johansson, Boguslaw A. Swedek | 2005-08-16 |
| 6924641 | Method and apparatus for monitoring a metal layer during chemical mechanical polishing | Hiroji Hanawa, Nils Johansson, Boguslaw A. Swedek | 2005-08-02 |
| 6910944 | Method of forming a transparent window in a polishing pad | Allan Gleason, William L. Guthrie | 2005-06-28 |
| 6887129 | Chemical mechanical polishing with friction-based control | Shijian Li | 2005-05-03 |
| 6878036 | Apparatus for monitoring a metal layer during chemical mechanical polishing using a phase difference signal | Hiroji Hanawa, Nils Johansson, Bogusla W Swedek | 2005-04-12 |
| 6878038 | Combined eddy current sensing and optical monitoring for chemical mechanical polishing | Nils Johansson, Boguslaw A. Swedek | 2005-04-12 |
| 6876454 | Apparatus and method for in-situ endpoint detection for chemical mechanical polishing operations | Nils Johansson, Allan Gleason | 2005-04-05 |
| 6875078 | Apparatus and method for in-situ endpoint detection for chemical mechanical polishing operations | Allan Gleason | 2005-04-05 |
| 6860791 | Polishing pad for in-situ endpoint detection | Allan Gleason | 2005-03-01 |
| 6857946 | Carrier head with a flexure | Steven M. Zuniga, Hung Chih Chen, Sen-Hou Ko | 2005-02-22 |
| 6841057 | Method and apparatus for substrate polishing | Ralph Wadensweiler, Alain Duboust, Liang-Yuh Chen, Ratson Morad, Paul D. Butterfield | 2005-01-11 |