Issued Patents 2005
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6975107 | Eddy current sensing of metal removal for chemical mechanical polishing | Nils Johansson, Boguslaw A. Swedek, Manoocher Birang | 2005-12-13 |
| 6939434 | Externally excited torroidal plasma source with magnetic control of ion distribution | Kenneth S. Collins, Yan Ye, Kartik Ramaswamy, Andrew Nguyen, Michael Barnes +1 more | 2005-09-06 |
| 6930478 | Method for monitoring a metal layer during chemical mechanical polishing using a phase difference signal | Nils Johansson, Boguslaw A. Swedek, Manoocher Birang | 2005-08-16 |
| 6924641 | Method and apparatus for monitoring a metal layer during chemical mechanical polishing | Nils Johansson, Boguslaw A. Swedek, Manoocher Birang | 2005-08-02 |
| 6893907 | Fabrication of silicon-on-insulator structure using plasma immersion ion implantation | Dan Maydan, Randir P. S. Thakur, Kenneth S. Collins, Amir Al-Bayati, Kartik Ramaswamy +2 more | 2005-05-17 |
| 6878036 | Apparatus for monitoring a metal layer during chemical mechanical polishing using a phase difference signal | Nils Johansson, Bogusla W Swedek, Manoocher Birang | 2005-04-12 |