Issued Patents 2005
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6975107 | Eddy current sensing of metal removal for chemical mechanical polishing | Hiroji Hanawa, Nils Johansson, Manoocher Birang | 2005-12-13 |
| 6966816 | Integrated endpoint detection system with optical and eddy current monitoring | Manoocher Birang, Nils Johansson | 2005-11-22 |
| 6945845 | Chemical mechanical polishing apparatus with non-conductive elements | Doyle E. Bennett, Sandeep Rammohan Koppikar, Jeffrey Drue David, Nils Johansson | 2005-09-20 |
| 6939198 | Polishing system with in-line and in-situ metrology | Bret W. Adams, Sanjay Rajaram, David A. Chan, Manoocher Birang | 2005-09-06 |
| 6930478 | Method for monitoring a metal layer during chemical mechanical polishing using a phase difference signal | Hiroji Hanawa, Nils Johansson, Manoocher Birang | 2005-08-16 |
| 6924641 | Method and apparatus for monitoring a metal layer during chemical mechanical polishing | Hiroji Hanawa, Nils Johansson, Manoocher Birang | 2005-08-02 |
| 6913511 | Method and apparatus for detecting an end-point in chemical mechanical polishing of metal layers | Andreas Norbert Wiswesser, Judon Tony Pan | 2005-07-05 |
| 6878038 | Combined eddy current sensing and optical monitoring for chemical mechanical polishing | Nils Johansson, Manoocher Birang | 2005-04-12 |