Issued Patents 2005
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6975107 | Eddy current sensing of metal removal for chemical mechanical polishing | Hiroji Hanawa, Boguslaw A. Swedek, Manoocher Birang | 2005-12-13 |
| 6966816 | Integrated endpoint detection system with optical and eddy current monitoring | Boguslaw A. Swedek, Manoocher Birang | 2005-11-22 |
| 6945845 | Chemical mechanical polishing apparatus with non-conductive elements | Doyle E. Bennett, Sandeep Rammohan Koppikar, Jeffrey Drue David, Boguslaw A. Swedek | 2005-09-20 |
| 6930478 | Method for monitoring a metal layer during chemical mechanical polishing using a phase difference signal | Hiroji Hanawa, Boguslaw A. Swedek, Manoocher Birang | 2005-08-16 |
| 6924641 | Method and apparatus for monitoring a metal layer during chemical mechanical polishing | Hiroji Hanawa, Boguslaw A. Swedek, Manoocher Birang | 2005-08-02 |
| 6878038 | Combined eddy current sensing and optical monitoring for chemical mechanical polishing | Boguslaw A. Swedek, Manoocher Birang | 2005-04-12 |
| 6878036 | Apparatus for monitoring a metal layer during chemical mechanical polishing using a phase difference signal | Hiroji Hanawa, Bogusla W Swedek, Manoocher Birang | 2005-04-12 |
| 6876454 | Apparatus and method for in-situ endpoint detection for chemical mechanical polishing operations | Manoocher Birang, Allan Gleason | 2005-04-05 |