Issued Patents 2005
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6910944 | Method of forming a transparent window in a polishing pad | Manoocher Birang, William L. Guthrie | 2005-06-28 |
| 6875078 | Apparatus and method for in-situ endpoint detection for chemical mechanical polishing operations | Manoocher Birang | 2005-04-05 |
| 6876454 | Apparatus and method for in-situ endpoint detection for chemical mechanical polishing operations | Manoocher Birang, Nils Johansson | 2005-04-05 |
| 6860791 | Polishing pad for in-situ endpoint detection | Manoocher Birang | 2005-03-01 |