Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6977036 | Method and apparatus for substrate polishing | Alain Duboust, Liang-Yuh Chen, Manoocher Birang, Ratson Morad, Paul D. Butterfield | 2005-12-20 |
| 6962524 | Conductive polishing article for electrochemical mechanical polishing | Paul D. Butterfield, Liang-Yuh Chen, Yonqi Hu, Antoine P. Manens, Rashid Mavliev +5 more | 2005-11-08 |
| 6841057 | Method and apparatus for substrate polishing | Alain Duboust, Liang-Yuh Chen, Manoocher Birang, Ratson Morad, Paul D. Butterfield | 2005-01-11 |