Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6962524 | Conductive polishing article for electrochemical mechanical polishing | Paul D. Butterfield, Liang-Yuh Chen, Yonqi Hu, Rashid Mavliev, Stan Tsai +5 more | 2005-11-08 |
| 6884153 | Apparatus for electrochemical processing | Paul D. Butterfield | 2005-04-26 |
| 6848970 | Process control in electrochemically assisted planarization | Liang-Yuh Chen | 2005-02-01 |