Issued Patents 2005
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6977036 | Method and apparatus for substrate polishing | Ralph Wadensweiler, Alain Duboust, Liang-Yuh Chen, Manoocher Birang, Ratson Morad | 2005-12-20 |
| 6962524 | Conductive polishing article for electrochemical mechanical polishing | Liang-Yuh Chen, Yonqi Hu, Antoine P. Manens, Rashid Mavliev, Stan Tsai +5 more | 2005-11-08 |
| 6884153 | Apparatus for electrochemical processing | Antoine P. Manens | 2005-04-26 |
| 6841057 | Method and apparatus for substrate polishing | Ralph Wadensweiler, Alain Duboust, Liang-Yuh Chen, Manoocher Birang, Ratson Morad | 2005-01-11 |