Issued Patents 2005
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6979248 | Conductive polishing article for electrochemical mechanical polishing | Yongqi Hu, Yan Wang, Feng Q. Liu, Rashid Mavliev, Liang-Yuh Chen +2 more | 2005-12-27 |
| 6977036 | Method and apparatus for substrate polishing | Ralph Wadensweiler, Liang-Yuh Chen, Manoocher Birang, Ratson Morad, Paul D. Butterfield | 2005-12-20 |
| 6962524 | Conductive polishing article for electrochemical mechanical polishing | Paul D. Butterfield, Liang-Yuh Chen, Yonqi Hu, Antoine P. Manens, Rashid Mavliev +5 more | 2005-11-08 |
| 6899804 | Electrolyte composition and treatment for electrolytic chemical mechanical polishing | Lizhong Sun, Feng Q. Liu, Yuchun Wang, Yan Wang, Siew Neo +1 more | 2005-05-31 |
| 6841057 | Method and apparatus for substrate polishing | Ralph Wadensweiler, Liang-Yuh Chen, Manoocher Birang, Ratson Morad, Paul D. Butterfield | 2005-01-11 |
| 6837983 | Endpoint detection for electro chemical mechanical polishing and electropolishing processes | Yan Wang, Siew Neo, Liang-Yuh Chen | 2005-01-04 |