Issued Patents 2005
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6979250 | Carrier head with flexible membrane to provide controllable pressure and loading area | Steven M. Zuniga, Ming Kuie Tseng | 2005-12-27 |
| 6974371 | Two part retaining ring | Jeonghoon Oh, Steven M. Zuniga, Robert D. Tolles | 2005-12-13 |
| 6923714 | Carrier head with a non-stick membrane | Steven M. Zuniga | 2005-08-02 |
| 6913518 | Profile control platen | Steven M. Zuniga, Charles C. Garretson, Thomas H. Osterheld, Sen-Hou Ko, Mohsen Salek | 2005-07-05 |
| 6857946 | Carrier head with a flexure | Steven M. Zuniga, Manoocher Birang, Sen-Hou Ko | 2005-02-22 |
| 6857945 | Multi-chamber carrier head with a flexible membrane | Steven M. Zuniga | 2005-02-22 |
| 6857931 | Method of detecting a substrate in a carrier head | Ming-Kuei Tseng, Steven M. Zuniga | 2005-02-22 |
| 6848980 | Vibration damping in a carrier head | Steven M. Zuniga, Ramakrishna Cheboli | 2005-02-01 |