Issued Patents 2005
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6979250 | Carrier head with flexible membrane to provide controllable pressure and loading area | Steven M. Zuniga, Hung Chih Chen | 2005-12-27 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6979250 | Carrier head with flexible membrane to provide controllable pressure and loading area | Steven M. Zuniga, Hung Chih Chen | 2005-12-27 |