Issued Patents 2005
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6979250 | Carrier head with flexible membrane to provide controllable pressure and loading area | Hung Chih Chen, Ming Kuie Tseng | 2005-12-27 |
| 6974371 | Two part retaining ring | Hung Chih Chen, Jeonghoon Oh, Robert D. Tolles | 2005-12-13 |
| 6923714 | Carrier head with a non-stick membrane | Hung Chih Chen | 2005-08-02 |
| 6913518 | Profile control platen | Hung Chih Chen, Charles C. Garretson, Thomas H. Osterheld, Sen-Hou Ko, Mohsen Salek | 2005-07-05 |
| 6890249 | Carrier head with edge load retaining ring | Ming-Kuei Tseng | 2005-05-10 |
| 6872130 | Carrier head with non-contact retainer | — | 2005-03-29 |
| 6872122 | Apparatus and method of detecting a substrate in a carrier head | — | 2005-03-29 |
| 6857946 | Carrier head with a flexure | Manoocher Birang, Hung Chih Chen, Sen-Hou Ko | 2005-02-22 |
| 6857945 | Multi-chamber carrier head with a flexible membrane | Hung Chih Chen | 2005-02-22 |
| 6857931 | Method of detecting a substrate in a carrier head | Hung Chih Chen, Ming-Kuei Tseng | 2005-02-22 |
| 6848980 | Vibration damping in a carrier head | Hung Chih Chen, Ramakrishna Cheboli | 2005-02-01 |