Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6890249 | Carrier head with edge load retaining ring | Steven M. Zuniga | 2005-05-10 |
| 6857931 | Method of detecting a substrate in a carrier head | Hung Chih Chen, Steven M. Zuniga | 2005-02-22 |